Recently, Huang Chengjun, a researcher of the Health Electronics R&D Center of the Institute of Microelectronics, Chinese Academy of Sciences, and Mao Haiyang's team made progress in the research of nano forest flexible humidity sensors.

The existing humidity sensors have the problem of low sensitivity under low humidity conditions, making it difficult to meet the requirements of high-precision detection. The team has developed a new type of humidity sensitive material based on carbon quantum dots @ nanoforest composite structure. Taking advantage of the high porosity and superhydrophilicity of nanoforests, as well as the compatibility and wafer level preparation of nanoforests with flexible substrates, a new high-performance flexible humidity sensor and sensor array have been developed. Compared with flexible humidity sensors based on PI humidity sensitive materials or nano forest humidity sensitive materials, this sensor improves humidity detection sensitivity, especially under low humidity conditions, with a sensitivity increase of 4.3 times. Furthermore, the team explored the application of this sensor and sensor array in high-precision environmental humidity monitoring, skin humidity detection, fingertip proximity detection, and plant leaf transpiration detection, providing new technological solutions for the development of intelligent wearable devices and environmental monitoring technology fields.

The relevant research results are based on A highly sensitive flexible humidity sensor on a wafer level composite material of carbon-quantum-dots@nanofiber Clusters, published in Sensors and Actors B: Chemical. The research work was supported by the National Natural Science Foundation of China, the research and development plan of key fields in Guangdong Province, and the Youth Innovation Promotion Association of the Chinese Academy of Sciences.

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Application demonstration of high-performance flexible humidity sensors in different scenarios